| Field | Offset | Width | atsam3x8e |
|---|---|---|---|
| WKUPIS15 | 31 | 1 | ✔ |
| WKUPIS14 | 30 | 1 | ✔ |
| WKUPIS13 | 29 | 1 | ✔ |
| WKUPIS12 | 28 | 1 | ✔ |
| WKUPIS11 | 27 | 1 | ✔ |
| WKUPIS10 | 26 | 1 | ✔ |
| WKUPIS9 | 25 | 1 | ✔ |
| WKUPIS8 | 24 | 1 | ✔ |
| WKUPIS7 | 23 | 1 | ✔ |
| WKUPIS6 | 22 | 1 | ✔ |
| WKUPIS5 | 21 | 1 | ✔ |
| WKUPIS4 | 20 | 1 | ✔ |
| WKUPIS3 | 19 | 1 | ✔ |
| WKUPIS2 | 18 | 1 | ✔ |
| WKUPIS1 | 17 | 1 | ✔ |
| WKUPIS0 | 16 | 1 | ✔ |
| FWUPIS | 12 | 1 | ✔ |
| OSCSEL | 7 | 1 | ✔ |
| SMOS | 6 | 1 | ✔ |
| SMS | 5 | 1 | ✔ |
| SMRSTS | 4 | 1 | ✔ |
| BODRSTS | 3 | 1 | ✔ |
| SMWS | 2 | 1 | ✔ |
| WKUPS | 1 | 1 | ✔ |
| FWUPS | 0 | 1 | ✔ |